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薄膜型超导红外(光)探测器
Alternative TitleSUPERCONDUCTING THIN FILM INFRARED (LIGHT)DETECTOR
万云; 平一梅; 姚久胜; 北京8701信箱
Department空间天气学国家重点实验室
Source Publication光子学报
2002
Volume31Issue:9Pages:1138-1142
ISSN1004-4213
Language中文
Keyword超导薄膜 红外探测器 红外探测阵列
Abstract在高Tc GdBaCuO超导薄膜上,采用光刻技术分别制成两种不同结构的辐射、热测量器件及2×4集成阵列式微桥器件红外(光)探测器.探测器芯片安装在STD-3型红外探测器杜瓦冷指上.用黑体及波长为0.6328μm的He-Ne激光器辐照器件,系统观测各种器件的特性,其中最好的结果:在10Hz时的噪音等效功率NEP(500,10,1)=3.6×10^-2WHz^1/2;探测率D^*(500,10,1)=1.6×10^10cmHz^1/2W^-1;响应率Rv=8.2×103VW^-1.另外,多元串接微桥器件出现的多台阶式的特性,可望在红外探测计量及高频方面获得重要应用.
Other AbstractTwo different patterns of Bolometer and the 2×4 array microbridge device are designed and fabricated using ordinary photolithography with high Tc superconducting GdBaCuO thin film.Using the blackbody of 500K and He2Ne laser,the properties of the devices are measured.The optimun results are as follows:NEP( 500,10,1)= 3.6×10WHz1/2,D3( 500,10,1) = 1.6×1010 cmHz1/2W-1,Rv=8.2×103VW- 1.The steps characteristic of the series microbridge device will be applied in the inf rared detectors in future.
Indexed ByCSCD
Funding Project中国科学院空间科学与应用研究中心
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.nssc.ac.cn/handle/122/1323
Collection空间科学部
Corresponding Author北京8701信箱
Recommended Citation
GB/T 7714
万云,平一梅,姚久胜,等. 薄膜型超导红外(光)探测器[J]. 光子学报,2002,31(9):1138-1142.
APA 万云,平一梅,姚久胜,&北京8701信箱.(2002).薄膜型超导红外(光)探测器.光子学报,31(9),1138-1142.
MLA 万云,et al."薄膜型超导红外(光)探测器".光子学报 31.9(2002):1138-1142.
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