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一种获取等离子体伏安特性曲线方法
Application NumberCN201110048048.6
丁亮; 朱翔; 孙简; 鉴福升; 徐跃民; 孙海龙; 吴逢时; 黄伟; 霍文清; 杨新杰; 姜昱光
2012
Application Date2011-02-28
Date Available2012-08-29
Country中国
Abstract本发明涉及一种获取等离子体伏安特性曲线方法,该方法在射频放电模式条件下用朗缪尔探针对等离子体参数进行探测,所述的朗缪尔探针在扫描电压的控制下对一探测点进行探测来获取参数采样值,从而得到等离子体的伏安特性曲线;其中,一次探针工作时间包括多个放电周期,同一放电周期内对所述的朗缪尔探针施加一个稳定的扫描电压,每个放电周期对应一个不同的扫描电压。
Language中文
Document Type专利
Identifierhttp://ir.nssc.ac.cn/handle/122/2160
Collection保障部/保障与试验验证中心
Recommended Citation
GB/T 7714
丁亮,朱翔,孙简,等. 一种获取等离子体伏安特性曲线方法[P]. 2012-01-01.
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