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一种有源静电电场探头
Application NumberCN201110228907.X
全荣辉; 韩建伟; 张振龙; 黄建国; 封国强; 李宏伟
2012
Application Date2011-08-10
Date Available2012-04-11
Country中国
Abstract本发明涉及一种有源静电电场探头。所述探头包括前端探头和电荷传感器,所述前端探头包括感应金属片(1),所述感应金属片(1)下方设置有环形的压电薄膜(2),该压电薄膜(2)通过相应的环形导电环(3)经电阻(14)与第一转接头(9)连接;所述感应金属片(1)上加有静电电压,并通过导引电极(4)经电阻(14)与第二转接头(17)连接。本发明的有源静电电场探头,其测量精度仅依赖于感应金属片电荷分辨率,其精度得到进一步提高;测量反应时间仅依赖于感应金属片受到电场作用时间,因此测量反应快;而且其结构简单,成本低廉,适用于真空转接环境。
Language中文
Document Type专利
Identifierhttp://ir.nssc.ac.cn/handle/122/2169
Collection保障部/保障与试验验证中心
Recommended Citation
GB/T 7714
全荣辉,韩建伟,张振龙,等. 一种有源静电电场探头[P]. 2012-01-01.
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