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一种离子产生装置
Application NumberCN201110206349.7
徐跃民; 孙海龙; 吴逢时; 丁亮; 鉴福升; 孙简; 霍文青; 杨新杰
2011
Application Date2011-07-22
Date Available2011-12-11
Country中国
Abstract本发明涉及一种离子产生装置。所述装置包括工作气体储存罐(1)、等离子体矩(2)、微波源(3)、线圈(4)和流量控制器(10);所述等离子体矩(2)包括同轴设置的外导体(5)、内导体(6)、短路活塞(7)和喷口(8),所述短路活塞(7)设置于外导体(5)和内导体(6)之间;所述微波源(3)设置于外导体(5)前端的能量馈入点上,用于将能量馈入,外导体(5)和内导体(6)及短路活塞(7)之间形成微波谐振腔(9);所述外导体(5)前部外面缠绕包覆线圈(4),用于通电后产生螺旋磁场。通过本发明的装置对等离子体进行参数的控制时不再局限于密闭的腔体中进行,应用更加广泛。
Language中文
Document Type专利
Identifierhttp://ir.nssc.ac.cn/handle/122/2177
Collection保障部/保障与试验验证中心
Recommended Citation
GB/T 7714
徐跃民,孙海龙,吴逢时,等. 一种离子产生装置[P]. 2011-01-01.
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