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Alternative TitleDesign of measurement and control system of position of electrostatic levitation based on PSD
代斌; 孙志斌; 王飞龙; 翟光杰
Source Publication传感器与微系统
Keyword位置敏感探测器 静电悬浮 信号处理
Other AbstractA measurement and control system of three-dimensional(3D) position information of electrostatic levitation based on position sensitive detector(PSD) is setup and structure of PSD and position measurement and control principle of electrostatic levitation are analyzed.Output signal of PSD is processed by STC12C5A60S2 MCU,corresponding relationship between suspension sample position information and output voltage of PSD is obtained,and communication between MCU and upper PC,data analysis and processing,and position control on levitation sample are realized.Use zirconium materials to carry out suspension experiment and test results indicate that the system can realize non-contact measurement of sample position information and stable suspension of sample,and it has advantages of stable operation and reliable detecting data,and so on,and this measurement system laid foundation for material suspended heating and undercooling research.
Indexed ByCSCD
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Cited Times:3[CSCD]   [CSCD Record]
Document Type期刊论文
Recommended Citation
GB/T 7714
代斌,孙志斌,王飞龙,等. 基于PSD的静电悬浮位置测量与控制系统设计[J]. 传感器与微系统,2015,34(3):97.
APA 代斌,孙志斌,王飞龙,&翟光杰.(2015).基于PSD的静电悬浮位置测量与控制系统设计.传感器与微系统,34(3),97.
MLA 代斌,et al."基于PSD的静电悬浮位置测量与控制系统设计".传感器与微系统 34.3(2015):97.
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