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Alternative TitleSecondary Spot for Pulsed Laser SEE Testing
姜昱光; 封国强; 朱翔; 马英起; 上官士鹏; 余永涛; 韩建伟
Source Publication原子能科学技术
Keyword二次光斑 脉冲激光 硅衬底 单粒子效应
Other AbstractThe pulsed laser is an effective method to simulate single event effect (SEE) induced by heavy ions.When the laser focused on the chip surface using the backside approach,the laser spot was observed.The experiment data of Si substrate and Si wafer show that the secondary spot is formed due to the reflection of metal layer,and it is verified by the thickness of Si substrate and the depth of laser focusing.
Indexed ByEI ; CSCD
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GB/T 7714
姜昱光,封国强,朱翔,等. 基于脉冲激光单粒子效应的二次光斑研究[J]. 原子能科学技术,2013,47(12):2361-2364.
APA 姜昱光.,封国强.,朱翔.,马英起.,上官士鹏.,...&韩建伟.(2013).基于脉冲激光单粒子效应的二次光斑研究.原子能科学技术,47(12),2361-2364.
MLA 姜昱光,et al."基于脉冲激光单粒子效应的二次光斑研究".原子能科学技术 47.12(2013):2361-2364.
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