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激光微束背部辐照芯片试验的聚焦平面定位装置及方法
Application Number

CN201510347659.9

马英起; 韩建伟; 封国强; 姜昱光; 上官士鹏; 余永涛; 朱翔; 陈睿
2015-06-19
ClassificationG01n21/88(2006.01)i ; G01r31/26(2014.01)i
Country中国
Abstract

本发明提供了激光微束背部辐照芯片试验的聚焦平面定位装置,用于对被测器件进行聚焦平面定位,所述装置包括试验用激光源(1)、聚焦光路调节模块(2)、成像CCD模块(3)、三维移动台(4)及三维移动台控制模块(5);所述试验用激光源(1)用于发射固定参数的脉冲激光;所述聚焦光路调节模块(2)用于对所述试验用激光源(1)发射的脉冲激光进行调节;所述成像CCD模块(3)用于对被测器件的激光反射光斑进行成像;所述三维移动台(4)用于放置被测器件试验电路板;所述三维移动台控制模块(5)用于接收所述成像CCD模块(3)输出的反射光斑成像信号,进行成像对比度检测后形成反馈信号指令,自动调节所述三维移动台(4)的位置。

Language中文
Document Type专利
Identifierhttp://ir.nssc.ac.cn/handle/122/5238
Collection保障部/保障与试验验证中心
Recommended Citation
GB/T 7714
马英起,韩建伟,封国强,等. 激光微束背部辐照芯片试验的聚焦平面定位装置及方法[P]. 2015-06-19.
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