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用于辅助镀膜的霍尔等离子体源
Alternative TitleThe hall accelerater for assisted deposition
尤大伟; 黄小刚; 武建军; 北京8701信箱
Department空间科学技术研究室
Source Publication光学仪器
2001
Volume23Issue:6Pages:58-62
ISSN1005-5630
Language中文
Keyword光学镀膜 离子束辅助镀膜 等离子体加速
Abstract论述了该源的工作原理,讨论并测试了该源最佳的磁场及分布.设计采用了永久磁铁并利用极靴产生发散磁,沿轴向有较大梯度的磁场,又称该源为端部霍尔加速器.最后给出了束流及均匀区实测结果.
Other AbstractThe design of the hall accelerater and the op t imum magnet ic st ructu re w ere p resen ted.The permenen t magnet w as app lied. The pole pieces w ere arranged to ob tain the divergen tmagnetism and st rong magnet ism gradien t along axial direct ion. The design gives u s a good resu lt s.
Funding Project中国科学院空间科学与应用研究中心
Document Type期刊论文
Identifierhttp://ir.nssc.ac.cn/handle/122/630
Collection空间技术部
Corresponding Author北京8701信箱
Recommended Citation
GB/T 7714
尤大伟,黄小刚,武建军,等. 用于辅助镀膜的霍尔等离子体源[J]. 光学仪器,2001,23(6):58-62.
APA 尤大伟,黄小刚,武建军,&北京8701信箱.(2001).用于辅助镀膜的霍尔等离子体源.光学仪器,23(6),58-62.
MLA 尤大伟,et al."用于辅助镀膜的霍尔等离子体源".光学仪器 23.6(2001):58-62.
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