NSSC OpenIR  > 空间科学部
Microfabricated vapor cells with reflective sidewalls for chip scale atomic sensors
Han, Runqi; You, Zheng; Zhang, Fan; Xue, Hongbo; Ruan, Yong; You, Zheng (yz-dpi@mail.tsinghua.edu.cn)
Department空间科学部
Source PublicationMicromachines
2018
Volume9Issue:4Pages:175
ISSN2072-666X
Language英语
KeywordMems Fabrication Rubidium Vapor Cells Reflectance Linear Absorption Contrast Coherent Population Trapping (Cpt) Spectroscopy Chip Scale Atomic Sensors
AbstractWe investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors. © 2018 by the authors.
Indexed BySCI ; EI
Document Type期刊论文
Identifierhttp://ir.nssc.ac.cn/handle/122/6305
Collection空间科学部
Corresponding AuthorYou, Zheng (yz-dpi@mail.tsinghua.edu.cn)
Recommended Citation
GB/T 7714
Han, Runqi,You, Zheng,Zhang, Fan,et al. Microfabricated vapor cells with reflective sidewalls for chip scale atomic sensors[J]. Micromachines,2018,9(4):175.
APA Han, Runqi,You, Zheng,Zhang, Fan,Xue, Hongbo,Ruan, Yong,&You, Zheng .(2018).Microfabricated vapor cells with reflective sidewalls for chip scale atomic sensors.Micromachines,9(4),175.
MLA Han, Runqi,et al."Microfabricated vapor cells with reflective sidewalls for chip scale atomic sensors".Micromachines 9.4(2018):175.
Files in This Item:
File Name/Size DocType Version Access License
2018mi9040175.pdf(21704KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Han, Runqi]'s Articles
[You, Zheng]'s Articles
[Zhang, Fan]'s Articles
Baidu academic
Similar articles in Baidu academic
[Han, Runqi]'s Articles
[You, Zheng]'s Articles
[Zhang, Fan]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Han, Runqi]'s Articles
[You, Zheng]'s Articles
[Zhang, Fan]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.