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一种半导体传感器窗厚测量方法及装置
Application Number2014108022174
杨垂柏;  张珅毅;  张斌全;  荆涛;  孙莹;  王文静;  曹光伟;  孔令高;  梁金宝;  孙越强
2014-12-19
Application Date2014-12-19
Date Available2016-07-13
Country中国
Language中文
IPC Classification NumberG01B15/02(2006.01)I
Document Type专利
Identifierhttp://ir.nssc.ac.cn/handle/122/6887
Collection空间环境部
Affiliation中国科学院空间科学与应用研究中心
Recommended Citation
GB/T 7714
杨垂柏, 张珅毅, 张斌全,等. 一种半导体传感器窗厚测量方法及装置[P]. 2014-12-19.
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