Measurement methods of focal spot size of micro-focus x-ray sources
Alternative Title20201408379887
Mou, Huan1; Li, Baoquan1,2; Cao, Yang1
Source PublicationProceedings of SPIE - The International Society for Optical Engineering
AbstractMicro-focus x-ray sources have been wildly applied to more and more fields1/4such as medical treatment, industrial area and aerospace. As the core indicator of micro-focus x-ray sources, the focal spot size directly affects performance of application scenarios. The smaller the focal spot size, the higher the resolution of micro-focus x-ray sources. So it is vitally important of accurately measuring the focal spot size. Three classic measurement standards of x-ray focal spot size, including the EN 12543, the IEC 60336 and the ASTM E 1165, have been introduced in detail. And the measurement principles, adaptive range, application objects and processing method of tested data are analyzed and compared. Then on this basis of three classic measurement standards, several measurement methods, scanning method, pinhole camera radiographic method, slit camera radiographic method, edge method and measurement of the effective focal spot size of mini and micro focus x-ray tubes, are expatiated. Additionally, advantages and disadvantages of various methods are expounded to readers, and some references are offered to demanders. © 2020 SPIE.
KeywordApplication objects Application scenario Focal spot size Measurement methods Measurement standards Medical treatment Micro-focus x-ray tubes X-ray sources
Conference Name2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Conference DateOctober 26, 2019 - October 28, 2019
Conference PlaceBeijing, China
Indexed ByEI
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Document Type会议论文
Affiliation1.National Space Science Center, Chinese Academy of Sciences, Beijing; 100190, China;
2.University of Chinese Academy of Sciences, Beijing; 100190, China
Recommended Citation
GB/T 7714
Mou, Huan,Li, Baoquan,Cao, Yang. Measurement methods of focal spot size of micro-focus x-ray sources[C],2020:114340C.
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